Abstract

MEMS technology is pervading in all domains ranging from commercial to strategic sectors so it is imperative that application oriented development encompassing fabrication, characterization, assembly and packaging aspects to be looked into to get the reliable product. This article details the overview of MEMS sensors and various aspects such as thin film process, process characterization tools, assembly along with challenges in realization are presented. Reduction in measurement inaccuracy is extremely important and main parameters associated with the sensors are explained.

Authors

Kamaljeet Singh
ISRO Satellite Centre, Bangalore, India

Keywords

MEMS, Sensors, Fabrication Process, Assembly