ANALYSIS OF COMPLEMENTARY BEAM STRUCTURED RF MEMS SWITCH FOR WIRELESS APPLICATIONS
Abstract
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This paper analysis the performance of a RF MEMS switch having a complementary beam structure operating at frequency ranging from 0 to 12GHz, which facilitates its application in the field of wireless mobile communication. This design is a modified cantilever beam forming a complementary structure with an easy fabrication process to implement. The switch is designed in form of a meander beam spring type in order to lower the spring constant there by achieving a relatively less pull-in voltage for actuation. The simulated results show a pull-in voltage of about 4V with the complementary cantilever beam structure. RF analysis shows a negligible insertion loss of -0.113dB and -7.181dB in the up-state of the switch from 0 to 12GHz. The isolation in the up-state was -57.62dB at 12GHz.

Authors
R Raman, T Shanmuganantham
Pondicherry University, India

Keywords
RF MEMS, Switch, Cantilever Beam, Pull-in Voltage, Electrostatic Actuation, Coplanar Waveguide
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Published By :
ICTACT
Published In :
ICTACT Journal on Microelectronics
( Volume: 2 , Issue: 4 , Pages: 329-332 )
Date of Publication :
January 2017
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141
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