PERFORMANCE ANALYSIS OF SLOTTED SQUARE DIAPHRAGM FOR MEMS PRESSURE SENSOR

Abstract
In this paper Micro-electromechanical System (MEMS) diaphragm based pressure sensor for environmental applications was discussed. The main focus of this paper was to design, simulate and analyze the sensitivity of MEMS based diaphragm using square and slotted square structures to measure the linearity pressure values. The simulation was done through the finite element tool and specifications related the maximum convinced stress; deflection and sensitivity of the diaphragms have been analyzed using the software INTELLISUITE 8.7v. The change in pressure was to bending of the diaphragm that modifies the measured displacement between the substrate and the diaphragm. This change in displacement gives the measure of the pressure in that environment. The design of these studies can be used to improve the sensitivity of these devices. Here the sensor designs incorporating square and slotted square diaphragm were implemented and compared to realize the pressure-sensitive components. The pressure sensor has been designed to measure pressures in the range of 0 to 1MPa that is in the range of low pressure sensors. Therefore a slotted square diaphragm based pressure sensor produced better displacement, sensitivity and stress output responses compared with the other type.

Authors
A. Nallathambi, T. Shanmuganantham
Pondicherry University, India

Keywords
MEMS, Diaphragm, Displacement, Mises Stress
Published By :
ICTACT
Published In :
ICTACT Journal on Microelectronics
( Volume: 1 , Issue: 2 )
Date of Publication :
July 2015

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