ENHANCED OBJECT DETECTION IN MICROELECTRONIC CIRCUITS USING SEMI MEMS-BASED SUPERVISED LEARNING FRAMEWORK
Abstract
Object detection in microelectronic circuits is critical for ensuring design integrity, manufacturing precision, and fault tolerance. With increasing circuit complexity and miniaturization, conventional imaging and detection approaches often fail to deliver the required accuracy and reliability. Existing object detection techniques struggle with high-resolution micro-scale structures, suffer from high false positives, and are computationally intensive. Moreover, integrating detection techniques within MEMS-based systems remains a challenge due to sensor limitations and noise sensitivity. This work proposes a SEMI MEMS (Smart Electro-Mechanical Integrated Micro System)- based supervised learning approach combining MEMS sensor data with convolutional neural networks (CNNs) for real-time object detection in microelectronic layouts. A custom-trained CNN is integrated with signal data from capacitive MEMS sensors to enhance feature extraction in noisy environments. The proposed method achieves 96.2% detection accuracy, a 15.3% improvement over baseline MEMS-CNN hybrids. Precision and recall values are 0.94 and 0.97, respectively. Compared to existing methods, processing time decreased by 22%, and false detection rate dropped by 18%.

Authors
Arvind Kumar Shukla1, K. Regin Bose2
IFTM University, India1, Rajalakshmi Institute of Technology, India2

Keywords
MEMS Sensors, Supervised Learning, Object Detection, Microelectronics, CNN
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Published By :
ICTACT
Published In :
ICTACT Journal on Microelectronics
( Volume: 11 , Issue: 1 , Pages: 2027 - 2033 )
Date of Publication :
April 2025
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32
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